Effect of Fe<sub>3</sub>O<sub>4</sub> characteristics on properties of solid-phase Fenton reaction lapping pellets for single-crystal SiC

LU Jiabin; CAO Jiyang; DENG Jiayun; YAN Qiusheng; HU Da

doi:10.13394/j.cnki.jgszz.2022.0008

Volume 42 Issue 2

May 2022

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Article Navigation > Diamond & Abrasives Engineering > 2022 > 42(2): 223-232

LU Jiabin, CAO Jiyang, DENG Jiayun, YAN Qiusheng, HU Da. Effect of Fe3O4 characteristics on properties of solid-phase Fenton reaction lapping pellets for single-crystal SiC[J]. Diamond & Abrasives Engineering, 2022, 42(2): 223-232. doi: 10.13394/j.cnki.jgszz.2022.0008

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LU Jiabin, CAO Jiyang, DENG Jiayun, YAN Qiusheng, HU Da. Effect of Fe₃O₄ characteristics on properties of solid-phase Fenton reaction lapping pellets for single-crystal SiC[J]. Diamond & Abrasives Engineering, 2022, 42(2): 223-232. doi: 10.13394/j.cnki.jgszz.2022.0008

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Effect of Fe₃O₄ characteristics on properties of solid-phase Fenton reaction lapping pellets for single-crystal SiC

doi: 10.13394/j.cnki.jgszz.2022.0008

School of Mechanical and Engineering, Guangdong University of Technology, Guangzhou 510006, China

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Received Date: 2022-02-14
Accepted Date: 2022-04-11
Rev Recd Date: 2022-02-28

Abstract

Abstract

To improve the lapping quality and processing efficiency of single-crystal SiC, solid-state Fenton reaction lapping pellets were prepared. Effects of characteristics of Fe₃O₄ (particle size and mass fraction) solid-phase catalyst on hardness, flexural strength, porosity, catalytic performance, and lapping performance of single-crystal SiC were studied. The results show that with the increase of Fe₃O₄ particle size, the hardness and flexural strength decrease, porosity increases, catalytic performance decreases, the material removal rate M_MRRdecreases from 43.12 nm/min to 36.82 nm/min, and the surface roughness R_aincreases from 1.06 nm to 3.72 nm. As the Fe₃O₄ mass fraction increases, the hardness and flexural strength of the lapping pellets decrease, and the porosity and catalytic performance increase. The M_MRR decreases from 40.14 nm/min to 33.51 nm/min, the surface roughness R_a is 3.25 nm, 1.75 nm and 1.88 nm, respectively.
- Fe₃O₄ characteristics,
- solid-phase Fenton reaction lapping pellets,
- single-crystal SiC,
- lapping processing

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References

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Effect of Fe3O4 characteristics on properties of solid-phase Fenton reaction lapping pellets for single-crystal SiC

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Effect of Fe₃O₄ characteristics on properties of solid-phase Fenton reaction lapping pellets for single-crystal SiC