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Effect of Fe3O4 Characteristics on Properties of Solid-phase Fenton Reaction Lapping Pellets for Single-Crystal SiC[J]. Diamond &Abrasives Engineering. doi: 10.13394/j.cnki.jgszz.2022-0008
Citation: Effect of Fe3O4 Characteristics on Properties of Solid-phase Fenton Reaction Lapping Pellets for Single-Crystal SiC[J]. Diamond &Abrasives Engineering. doi: 10.13394/j.cnki.jgszz.2022-0008

Effect of Fe3O4 Characteristics on Properties of Solid-phase Fenton Reaction Lapping Pellets for Single-Crystal SiC

doi: 10.13394/j.cnki.jgszz.2022-0008
  • Received Date: 2022-02-14
  • Accepted Date: 2022-04-11
  • Rev Recd Date: 2022-03-23
  • Available Online: 2022-04-15
  • To improve the lapping quality and processing efficiency of single-crystal SiC, solid-state Fenton reaction lapping pellets were prepared. Effects of particle size and concentration of Fe3O4 solid-phase catalyst on the physical properties (hardness, flexural strength, porosity), catalytic performance, and lapping performance of single-crystal SiC were studied. The results showed that with the increase of Fe3O4 particle size, the hardness, flexural strength, porosity, and catalytic performance of the lapping pellets all decreased, the material removal rate (MRR) decreased from 43.12 nm/min to 36.82 nm/min, and the surface roughness (Ra) increased from 1.06 nm to 3.72 nm. As the Fe3O4 concentration increased, the hardness and flexural strength of the lapping pellets decreased, and the porosity and catalytic performance increased. Although the material removal rate decreased, the surface roughness (Ra) decreased firstly and then increased. The MRR decreased from 40.14 nm/min to 33.51 nm/min, the surface roughness (Ra) was 3.25 nm, 1.75 nm and 1.88 nm. In this experiment, when the Fe3O4 particle size and the concentration was 0.5 µm and 29 wt.%, the processing effect was the best, the MRR and the surface roughness (Ra) was 43.13 nm/min and 1.06 nm.

     

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      沈阳化工大学材料科学与工程学院 沈阳 110142

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