Research progress of preparation methods of diamond-based MEMS

LU Yunxiang; MAN Weidong; LUO Hongtai; CHEN Menghuan; CHEN Peiqin

doi:10.13394/j.cnki.jgszz.2018.4.0004

Volume 38 Issue 4

Aug. 2018

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LU Yunxiang, MAN Weidong, LUO Hongtai, CHEN Menghuan, CHEN Peiqin. Research progress of preparation methods of diamond-based MEMS[J]. Diamond & Abrasives Engineering, 2018, 38(4): 20-26. doi: 10.13394/j.cnki.jgszz.2018.4.0004

Citation:

LU Yunxiang, MAN Weidong, LUO Hongtai, CHEN Menghuan, CHEN Peiqin. Research progress of preparation methods of diamond-based MEMS[J]. Diamond & Abrasives Engineering, 2018, 38(4): 20-26. doi: 10.13394/j.cnki.jgszz.2018.4.0004

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Research progress of preparation methods of diamond-based MEMS

doi: 10.13394/j.cnki.jgszz.2018.4.0004

Hubei Key Laboratory of Plasma Chemistry and Advanced Materials, Wuhan Institute of Technology, Wuhan 430073, China

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Rev Recd Date: 2018-05-12

Available Online: 2022-07-07

Abstract

Abstract

Due to its unique physical, chemical, and electrical properties and the feasibility of growing in the form of thin films, diamond is an ideal material for manufacturing reliable and long-life micro-electromechanical/nanoelectromechanical systems (MEMS/NEMS). In recent years, the development of chemical vapor deposition of diamond thin film has promoted the application of diamond in MEMS and realized a new era of development of diamond-based MEMS and NEMS. However, due to the difficulty in precise processing, diamond has not yet been widely applied in NEMS/MEMS. In this article,the current research progress of diamond-based MEMS is introduced, as well as the processing methods of diamond-based MEMS system. The prospect of diamond application in MEMS is proposed.
- diamond,
- micro-electromechanical system,
- laser processing,
- plasma etching