When chemical-mechanically polishing 304 stainless steel,the effects of polishing pressure,polishing slurry flow rate,polishing speed and polishing time on the material removal rate and surface roughness are studied for better performance,lower cost and higher efficiency.Experimental results show that the material removal rate reaches 226.56 nm/min and the surface roughness reduces to 6nm at the condition of polishing pressure 13.79 kPa,slurry flow rate 15 mL/min,polishing time 35 min,and polishing speed 60 r/min,which ensures the best surface rough degree and higher material removal rate.