Influence of distance between filaments on preparation of diamond thick films

ZHAO Zhiyan; ZHOU Mingyu; HAO Chao

doi:10.13394/j.cnki.jgszz.2016.1.0007

Volume 36 Issue 1

Feb. 2016

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ZHAO Zhiyan, ZHOU Mingyu, HAO Chao. Influence of distance between filaments on preparation of diamond thick films[J]. Diamond & Abrasives Engineering, 2016, 36(1): 31-33. doi: 10.13394/j.cnki.jgszz.2016.1.0007

Citation:

ZHAO Zhiyan, ZHOU Mingyu, HAO Chao. Influence of distance between filaments on preparation of diamond thick films[J]. Diamond & Abrasives Engineering, 2016, 36(1): 31-33. doi: 10.13394/j.cnki.jgszz.2016.1.0007

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Influence of distance between filaments on preparation of diamond thick films

doi: 10.13394/j.cnki.jgszz.2016.1.0007

Langfang Supower Diamond Technology Co., Ltd., Langfang 065300, Hebei, China

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Rev Recd Date: 2015-12-20

Available Online: 2022-07-27

Abstract

Abstract

Diamond thick films are fabricated by hot filament chemical vapor deposition(HFCVD).The distance between filaments and enclosure are investigated to obtain high quality diamond thick films.By changing the distance between filaments and setting up enclosure,the growth rate can be up to 7.5 μm/h,and the thermal conductivity can be 1028 W/(m·K).The diamond films have dense structure and even let the red light through.
- hot filament chemical vapor deposition,
- diamond thick films,
- distance between filaments,
- enclosure