Ultra-precision machining test of diamond sand belt for Si3N4 ceramic cylindrical roller
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摘要: Si3N4陶瓷圆柱滚子在极端工况中表现出优异的服役性能，但其硬脆特性等导致加工困难。为实现Si3N4陶瓷圆柱滚子高质量、高柔性的加工，提出金刚石砂带超精加工方法。通过搭建金刚石砂带超精加工试验平台，设计正交试验并对试验数据进行水平响应分析和方差分析，研究金刚石砂带磨料粒度、砂带线速度、砂带压力、导辊转速对Si3N4陶瓷圆柱滚子工件（ϕ10 mm × 12 mm）表面粗糙度Ra和材料去除率RMRR的影响规律。结果表明：金刚石砂带磨料粒度对工件表面粗糙度和材料去除率的影响均最显著，砂带压力相较于砂带线速度和导辊转速对工件表面粗糙度的影响较大，而砂带线速度相较于砂带压力和导辊转速对材料去除率的影响较大。当金刚石砂带磨料粒度代号为P3000、砂带线速度为10 m/s、砂带压力为94 N、导辊转速为300 r/min时，工件表面粗糙度最小值为0.045 2 μm；当金刚石砂带磨料粒度代号为P2000、砂带线速度为20 m/s、砂带压力为94 N、导辊转速为200 r/min时，材料去除率最大值为1.075 31 μm/min。采用金刚石砂带超精加工方法，可有效提高Si3N4陶瓷圆柱滚子的表面质量。
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关键词:
- Si3N4陶瓷圆柱滚子 /
- 金刚石砂带 /
- 表面粗糙度 /
- 超精密加工
Abstract:Objectives Si3N4 ceramic cylindrical rollers show excellent service performance in extreme working conditions, but their hardness and brittleness and other characteristics lead to difficulties in machining. To realize high-quality and highly flexible machining and manufacturing of Si3N4 ceramic cylindrical rollers, a diamond abrasive belt super-finishing machining method for Si3N4 ceramic cylindrical rollers is proposed. Methods By building an ultra precision machining experimental platform with a diamond abrasive belt, designing orthogonal experiments, and conducting horizontal response analysis and ANOVA on the experimental data, the influences of abrasive particle size in the diamond abrasive belt, abrasive belt linear velocity, abrasive belt pressure and guide roller speed on the surface roughness Ra and the material removal rate RMRR of Si3N4 ceramic cylindrical roller workpieces (ϕ 10 mm × 12 mm) are studied. Results The effects of abrasive grain size in the diamond abrasive belt on both surface roughness and material removal rate of the workpiece are the most significant. The effects of diamond abrasive belt pressure on the surface roughness of the workpiece are larger compared to those of diamond abrasive belt linear speed and guide roller rotational speed, while the effects of diamond abrasive belt linear speed on material removal rate are larger compared to those of diamond abrasive belt pressure and guide roller rotational speed. The minimum value of surface roughness of the workpiece is 0.0452 μm when the grain size code of the diamond belt is P3000, the linear speed of the diamond belt is 10 m/s, the pressure of the diamond belt is 94 N, and the rotational speed of the guide roller is 300 r/min; the minimum surface roughness of the workpiece is also 0.045 2 μm when the grain size code of the diamond belt is P2000, the linear speed of the diamond belt is 20 m/s, the pressure of the diamond belt is 94 N, the rotational speed of the guide roller is 200 r/min. When the rotational speed is 200 r/min, the maximum material removal rate is 1.075 31 μm/min.Conclusions The surface quality of Si3N4 ceramic cylindrical rollers can be effectively improved by using the superfinishing method with a diamond abrasive belt. -
图 4 金刚石砂带磨料粒度对表面粗糙度和材料去除率的影响
Figure 4. Effect of abrasive particle size on surface roughness and material removal rate of diamond abrasive belt
图 5 金刚石砂带线速度对表面粗糙度和材料去除率的影响
Figure 5. Effect of linear velocity of diamond abrasive belt on surface roughness and material removal rate
图 6 金刚石砂带压力对表面粗糙度和材料去除率的影响
Figure 6. Effect of diamond abrasive belt pressure on surface roughness and material removal rate
图 7 导辊转速对表面粗糙度和材料去除率的影响
Figure 7. Effect of guide roller speed on surface roughness and material removal rate
图 8 金刚石砂带超精加工前后的Si3N4陶瓷圆柱滚子实物
Figure 8. Si3N4 ceramic cylindrical roller before and after superfinishing of diamond abrasive belt
图 9 超精加工前后的Si3N4圆柱滚子形貌（超景深显微镜观测）
Figure 9. Appearance of Si3N4 cylindrical roller before and after superfinishing (ultra depth microscope observation)
图 10 超精加工前后的Si3N4圆柱滚子形貌 （白光干涉仪观测）
Figure 10. Appearance of Si3N4 cylindrical roller before and after superfinishing (white light interferometer observation)
表 1 金刚石砂带磨削的参数及水平
Table 1. Parameters and levels of diamond sand belt grinding
水平 因素 砂带粒
度号砂带线速度
vb / (m·s−1)砂带压力
F / N导辊转速
ωa / (r·min−1)1 P1500 10 31 100 2 P2000 15 47 150 3 P2500 20 63 200 4 P3000 25 94 300 
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表 2 Si3N4陶瓷材料性能参数
Table 2. Performance parameters of Si3N4 ceramic material
参数 取值 密度 ρ / (g∙cm−3) 3.26 弹性模量 E / GPa 310 硬度 H / GPa 16 泊松比 ε 0.25 断裂韧性 KIC / (MPa∙m−2) 7.0 线膨胀系数 λ / K−1 3.2 × 10−6
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表 3 正交试验结果
Table 3. Results of orthogonal experiments
实验
序号结果 磨料粒
度代号砂带线
速度
vb / (m·s−1)砂带
压力
F / N导辊转速
ωa /
(r·min−1)表面粗
糙度
Ra / μm材料去除率
RMRR/
(μm·min−1)1 P1500 10 31 200 0.098 2 0.803 91 2 P1500 15 47 300 0.092 0 1.017 65 3 P1500 20 63 100 0.086 6 0.946 53 4 P1500 25 94 150 0.088 2 0.872 35 5 P2000 10 47 100 0.082 1 0.680 57 6 P2000 15 31 150 0.079 4 0.804 38 7 P2000 20 94 200 0.069 6 1.075 31 8 P2000 25 63 300 0.074 9 0.854 37 9 P2500 10 63 150 0.071 1 0.826 54 10 P2500 15 94 100 0.060 5 0.723 56 11 P2500 20 31 300 0.058 6 0.803 45 12 P2500 25 47 200 0.066 2 0.808 32 13 P3000 10 94 300 0.045 2 0.706 42 14 P3000 15 63 200 0.053 6 0.654 32 15 P3000 20 47 150 0.050 0 0.733 15 16 P3000 25 31 100 0.062 4 0.803 45
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