Fabrication method of high energy beam for solid-state nanopore

CHEN Wei; ZHENG Lijuan; AI Siqi; LIU Youming; WANG Chengyong; YUAN Zhishan

doi:10.13394/j.cnki.jgszz.2023.0009

Volume 43 Issue 1

Feb. 2023

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CHEN Wei, ZHENG Lijuan, AI Siqi, LIU Youming, WANG Chengyong, YUAN Zhishan. Fabrication method of high energy beam for solid-state nanopore[J]. Diamond & Abrasives Engineering, 2023, 43(1): 1-9. doi: 10.13394/j.cnki.jgszz.2023.0009

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CHEN Wei, ZHENG Lijuan, AI Siqi, LIU Youming, WANG Chengyong, YUAN Zhishan. Fabrication method of high energy beam for solid-state nanopore[J]. Diamond & Abrasives Engineering, 2023, 43(1): 1-9. doi: 10.13394/j.cnki.jgszz.2023.0009

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Fabrication method of high energy beam for solid-state nanopore

doi: 10.13394/j.cnki.jgszz.2023.0009

CHEN Wei^{1, 2
,},
ZHENG Lijuan^{1, 2
,},
AI Siqi^{1, 2},
LIU Youming^{1, 2},
WANG Chengyong^{1, 2
,},
YUAN Zhishan^{1, 2
,
,}

1.
Guangdong Provincial Key Laboratory of Minimally Invasive Surgical Instruments and Manufacture Technology , Guangdong University of Technology, Guangzhou 510006, China
2.
Mechanical and Electrical Engineering , Guangdong University of Technology, Guangzhou 510006, China

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Received Date: 2023-01-15
Accepted Date: 2023-02-09
Rev Recd Date: 2023-02-04

Abstract

Abstract

Solid-state nanopores have drawn the interest of numerous researchers due to their excellent mechanical properties, stability, and shape control, which have demonstrated tremendous potential in gene detection, protein detection, energy conversion, material separation, and water purification. And shape-controlled and efficient solid-state nanopore manufacturing technology is the prerequisite for the application of solid-state nanopore. At present, the high energy beam manufacturing method has the advantages of high efficiency, high precision and high manufacturing controllability among the conventional solid state nanopore manufacturing methods. This paper provides an overview of four solid state nanopore fabrication methods including high energy electron beam, focused ion beam, laser etching and ion track etching and their fundamental principles. The benefits and drawbacks of these methods, as well as their feasibility for large-scale controlled fabrication are discussed.
- solid nanopore,
- high-energy beam manufacturing,
- manufacturing method.

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References

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Fabrication method of high energy beam for solid-state nanopore

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