Citation: | XU Yuchun, ZHU Jianhui, WANG Ningchang, SHI Chaoyu, ZHAO Yanjun, SHAO Junyong, XU Shuai. Analysis on the lapping uniformity of MPCVD polycrystalline diamond wafer[J]. Diamond & Abrasives Engineering, 2022, 42(6): 705-712. doi: 10.13394/j.cnki.jgszz.2022.0162 |
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