Investigation of weak corrosion inhibitor for copper chemical mechanical polishing

XU Hao; SONG Enmin; BIAN Da; ZHAO Yongwu

doi:10.13394/j.cnki.jgszz.2021.5.0006

Volume 41 Issue 5

Oct. 2021

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XU Hao, SONG Enmin, BIAN Da, ZHAO Yongwu. Investigation of weak corrosion inhibitor for copper chemical mechanical polishing[J]. Diamond & Abrasives Engineering, 2021, 41(5): 32-39. doi: 10.13394/j.cnki.jgszz.2021.5.0006

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XU Hao, SONG Enmin, BIAN Da, ZHAO Yongwu. Investigation of weak corrosion inhibitor for copper chemical mechanical polishing[J]. Diamond & Abrasives Engineering, 2021, 41(5): 32-39. doi: 10.13394/j.cnki.jgszz.2021.5.0006

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Investigation of weak corrosion inhibitor for copper chemical mechanical polishing

doi: 10.13394/j.cnki.jgszz.2021.5.0006

XU Hao¹,
SONG Enmin¹,
BIAN Da^1,2,
ZHAO Yongwu^{1,2
,
,}

1. School of Mechanical Engineering, Jiangnan University, Wuxi 214122, Jiangsu, China;
2. Jiangsu Key Laboratory of Advanced Food Manufacturing Equipment & Technology, Wuxi 214122, Jiangsu, China

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Rev Recd Date: 2021-04-25

Abstract

Abstract

This study uses electrochemical, contact angle, chemical mechanical polishing and other experiments to study the effect of a new environmentally friendly potential copper corrosion inhibitor polyvinyl pyrrolidone(PVP). Experiment results show that PVP has a multi-purpose effect in copper chemical mechanical polishing. That mixing it with another environmentally friendly weak corrosion inhibitor TAZ ensures the flattening effect and environmental protection properties, and can achieve large removal of low pressure in industrial production. When the roughness is 2.28 nm, the removal rate can reach to 1 291 nm/min.
- copper,
- weak corrosion inhibitor,
- PVP,
- mixed corrosion inhibitor