Laser dressing technology for micro-grooves on the surface of metal-bonded diamond wheels

GUO Xuanyang; XU Yuchun; CAO Jianfeng; ZHU Jianhui; ZHAO Yanjun; ZHAO Jinwei; SHI Chaoyu

doi:10.13394/j.cnki.jgszz.2021.3006

Volume 42 Issue 3

Jul. 2022

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Article Navigation > Diamond & Abrasives Engineering > 2022 > 42(3): 364-372

GUO Xuanyang, XU Yuchun, CAO Jianfeng, ZHU Jianhui, ZHAO Yanjun, ZHAO Jinwei, SHI Chaoyu. Laser dressing technology for micro-grooves on the surface of metal-bonded diamond wheels[J]. Diamond & Abrasives Engineering, 2022, 42(3): 364-372. doi: 10.13394/j.cnki.jgszz.2021.3006

Citation:

GUO Xuanyang, XU Yuchun, CAO Jianfeng, ZHU Jianhui, ZHAO Yanjun, ZHAO Jinwei, SHI Chaoyu. Laser dressing technology for micro-grooves on the surface of metal-bonded diamond wheels[J]. Diamond & Abrasives Engineering, 2022, 42(3): 364-372. doi: 10.13394/j.cnki.jgszz.2021.3006

Citation:

GUO Xuanyang, XU Yuchun, CAO Jianfeng, ZHU Jianhui, ZHAO Yanjun, ZHAO Jinwei, SHI Chaoyu. Laser dressing technology for micro-grooves on the surface of metal-bonded diamond wheels[J]. Diamond & Abrasives Engineering, 2022, 42(3): 364-372. doi: 10.13394/j.cnki.jgszz.2021.3006

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Laser dressing technology for micro-grooves on the surface of metal-bonded diamond wheels

doi: 10.13394/j.cnki.jgszz.2021.3006

GUO Xuanyang^{1, 2
,},
XU Yuchun^{1, 2},
CAO Jianfeng²,
ZHU Jianhui^{1, 2},
ZHAO Yanjun^{1, 2},
ZHAO Jinwei²,
SHI Chaoyu^{1, 2}

1.
State Key Laboratory of Superabrasives, Zhengzhou 450001, China
2.
Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd., Zhengzhou 450001, China

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Received Date: 2021-04-06
Rev Recd Date: 2022-03-04

Abstract

Abstract

In order to solve the difficult problem of dressing micro-grooves on the surface of metal-bonded diamond wheel, an infrared nanosecond laser was used to carry out the dressing test. The influences of laser average power, pulse repetition frequency, laser ablation time and other factors on the material removal of metal-bonded diamond grinding wheel was investigated. A gradient step laser dressing process was proposed for U-shaped and V-shaped grinding wheel micro-grooves. The results show that the actual contour of the grinding wheel micro-groove after dressing is compared with the designed contour, the maximum absolute value of the relative error of the actual width at the top and bottom is 4.4%, and the maximum absolute value of the relative error of the actual depth is 9.6%. The edge of the sapphire wafer with a diameter of 4 inches (10.16 cm) is chamfered with the V-shaped micro-groove of the trimmed grinding wheel. The sharp edge of the wafer is trimmed into a regular shape, and the symmetry of the edge contour is good, which is consistent with the micro-groove contour of the surface of the laser trimmed grinding wheel. The feasibility of laser shaping and dressing of the micro-groove on the surface of metal-bonded diamond grinding wheel is verified.
- laser processing,
- metal-bonded diamond wheel,
- micro-groove dressing,
- wafer edge grinding

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References

[1]	安瑞阳, 蔡丽艳, 苏冰, 等. 改善200 mm晶圆边缘加工产能的工艺研究 [J]. 材料科学,2020,10(9):794-798. doi: 10.12677/MS.2020.109094 AN Ruiyang, CAI Liyan, SU Bing, et al. Process research to improve the edge processing capacity of 200 mm wafers [J]. Material Sciences,2020,10(9):794-798. doi: 10.12677/MS.2020.109094
[2]	庄司克雄. 磨削加工技术 [M]. 郭隐彪, 王振忠, 译. 北京: 机械工业出版社, 2007. SYOJI Katsuo. Grinding technology [M]. Translated by GUO Yinbiao, WANG Zhenzhong. Beijing: China Machine Press, 2007.
[3]	范红伟, 袁巨龙, 吕冰海, 等. 金属结合剂砂轮的研究与发展 [J]. 航空精密制造技术, 2010, 46(4): 38-41. FAN Hongwei, YUAN Julong, LYU Binghai, et al. Progress and prospect metal bonded grinding wheel [J]. Aviation Precision Manufacturing Technology, 2010, 46(4): 38-41.
[4]	陈海深, 张喜平. 金属结合剂金刚石成型砂轮电火花修整方法研究 [J]. 工具技术,2015,49(6):25-29. doi: 10.3969/j.issn.1000-7008.2015.06.006 CHEN Haishen, ZHANG Xiping. Study on EDM dressing method of metal bond matrix diamond grinding wheel [J]. Tool Engineering,2015,49(6):25-29. doi: 10.3969/j.issn.1000-7008.2015.06.006
[5]	焦峰, 李成龙, 牛赢, 等. 砂轮修整技术研究现状与展望 [J]. 中国机械工程,2021(3):1-16. JIAO Feng, LI Chenglong, NIU Ying, et al. Review and prospect of grinding wheel dressing technique [J]. China Mechanical Engineering,2021(3):1-16.
[6]	何广川. 浅谈激光加工技术的现状及发展 [J]. 现代制造技术与装备,2020,56(10):160-161. doi: 10.3969/j.issn.1673-5587.2020.10.069 HE Guangchuan. The present situation and development of laser processing technology [J]. Modern Manufacturing Technology and Equipment,2020,56(10):160-161. doi: 10.3969/j.issn.1673-5587.2020.10.069
[7]	胡晓冬, 李元龙, 白少状, 等. 激光在材料去除加工中应用的研究进展 [J]. 激光与光电子学进展,2020(7):1-16. HU Xiaodong, LI Yuanlong, BAI Shaozhuang, et al. Research progress of laser application in material removal [J]. Laser & Optoelectronics Progress,2020(7):1-16.
[8]	杜洋, 赵凯, 朱忠良, 等. 超快激光精密制造技术的研究与应用 [J]. 激光与红外,2020(12):1419-1425. doi: 10.3969/j.issn.1001-5078.2020.12.001 DU Yang, ZHAO Kai, ZHU Zhongliang, et al. Research and application of ultrafast laser precision manufacturing technology [J]. Laser & Infrared,2020(12):1419-1425. doi: 10.3969/j.issn.1001-5078.2020.12.001
[9]	江海河. 激光加工技术应用的发展及展望 [J]. 光电子技术与信息,2001(4):1-12. JIANG Haihe. Development and forecast of the laser processing technology application [J]. Optoelectronic Technology & Information,2001(4):1-12.
[10]	HOSOKAWA A, UEDA T, YUNOKI T. Laser dressing of metal bonded diamond wheel [J]. CIRP Annals Manufacturing Technology,2006,55(1):329-332. doi: 10.1016/S0007-8506(07)60428-4
[11]	ADRIAN H A, ALESSANDRO F, FILIPPO Z, et al. Pulsed laser profiling of grinding wheels at normal and quasi-tangential incidence [J]. Lasers in Manufacturing & Materials Processing,2016(3):158-173.
[12]	陈根余, 陈冲, 卜纯, 等. 激光在线修整青铜金刚石砂轮数值仿真与试验 [J]. 激光技术,2012,36(4):433-437. doi: 10.3969/j.issn.1001-3806.2012.04.001 CHEN Genyu, CHEN Chong, BU Chun, et al. Numerical simulation and experiment for on-line truing and dressing of bronze-bonded diamond grinding wheels with laser [J]. Laser Technology,2012,36(4):433-437. doi: 10.3969/j.issn.1001-3806.2012.04.001
[13]	陈根余, 周兴才, 周聪, 等. 树脂结合剂CBN砂轮光纤激光径向修锐及磨削实验研究 [J]. 中国激光,2015,42(2):124-131. CHEN Genyu, ZHOU Xingcai, ZHOU Cong, et al. Experimental research on fiber laser radial sharpening of resin-bonded CBN grinding wheels and grinding characteristics [J]. Chinese Journal of Lasers,2015,42(2):124-131.
[14]	SHANKAR U, BABU N R. A model for predicting the geometry of crater on grinding wheel surface ablated with a single pulsed laser [J]. Procedia Manufacturing,2018,26:509-520. doi: 10.1016/j.promfg.2018.07.060
[15]	刘健平, 陈根余, 周聪, 等. V形凹面青铜金刚石砂轮脉冲激光修整试验研究 [J]. 应用激光,2017,37(4):557-562. LIU Jianping, CHEN Genyu, ZHOU Cong, et al. Experimental study on pulsed laser dressing bronze diamond wheel V-shaped concave surfaces [J]. Applied Laser,2017,37(4):557-562.
[16]	CHANG J J, WARNER B E, DRAGON E P, et al. Precision micromachining with pulsed green lasers [J]. Journal of Laser Applications,1998,10(6):285-291. doi: 10.2351/1.521863

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Laser dressing technology for micro-grooves on the surface of metal-bonded diamond wheels

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