Optimization of process parameters for lapping quartz glass with fixed abrasive

The material removal rate and the surface roughness were taken as indexes to evaluate quartz glass quality, and the rotating speed (A), the pressure (B) and the lapping slurry type (C) as the influencing factors were studied in the orthogonal test of grinding quartz glass with fixed abrasive. Regression analysis was carried out on the test results, and the influence rule model of three factors on the removal rate and the surface roughness of quartz glass was established. The results show that the most significant factor affecting the removal rate of quartz glass is B, followed by C and A. The most significant factor affecting the surface roughness of quartz glass is A, followed by B and C. The optimum grinding process parameters for the material removal rate are triethanolamine slurry at the rotating speed of 100 r/min and the pressure of 27.580 kPa. The optimum process parameters for the surface roughness are ethylenediamine slurry at the rotating speed of 100 r/min and the pressure of 27.580 kPa. At the same time, the relationship between the material removal rate and the rotating speed is a quadratic function, while the relationship between the material removal rate and the pressure is an exponential function, and the relationships between the surface roughness and the rotating speed & the pressure are both power functions. Triethanolamine slurry can be selected when the material removal rate is the priority objective, and ethylenediamine slurry can be selected when the surface quality is the priority objective.