To accurately predict temperature field changes of the surface and subsurface workpiece, based on the principle of anti-heat source and the actually measured grinding temperature, using the temperature matching method, a heat source model of the contact zone in the real grinding process was established. Comparing with prediction results of Rayleigh heat source model, the finite element method was used to simulate the change of the grinding temperature field of the workpiece. The grinding temperature field at different depths of the workpiece in the grinding zone was measured. The results show that the heat source model based on the temperature matching method has good consistency with the measured values at different depths on the surface and subsurface. The relative error is between 3.0% and 7.5%. Compared with the Rayleigh heat source model, the distribution accuracy of predicted temperature field is improved nearly 2 times.