Development of automatic double-spindle precise dicing saw

In order to improve dicing quality and efficiency, a double-spindle precision dicing saw is developed. It adopts a gantry structure with parallel axes Y1 & Y2 and closed-loop control. The rotary table is driven directly by DD motor. Loading and unloading system of the saw can realize multi-plate automatic feeding. Test results show that the positioning accuracy of axes Y1 & Y2 is up to 1.5 μm, that the repeatability accuracy of axes Z1 & Z2 is up to 1.0 μm, and that the table flatness is up to 4.3 μm. After dicing test, it is found that the maximum error between actual depth and designed depth of groove is 5.2 μm, and that the maximum error between actual position and designed position of dicing trace is 4.8 μm, the trace surface of which is smooth with small chipping but no burrs. Compared with traditional single-spindle dicing saw in China, the developed one has 80% higher dicing efficiency obviously improved dicing quality.