Research on process of high-efficiency precise dicing optical glass

Single factor tests are implemented on self-developed FAD 1210 high-precision and high-efficiency slicing machine. The influences of clamping method, dicing blade type and water flow rate on the sliced K9 optical glass are studied and evaluated by measuring the chipping size and the surface roughness of the glass. The results show that the fastening mode of glass substrate has the best effect on the cutting of K9 optical glass, followed by UV film and high temperature silicone tape. The effect of resin bond dicing blade is ideal when dicing glass, with smaller chipping size and better surface roughness. The metal dicing blade ranks next and the effect of electroplating dicing blade is worst. With the increase of dicing water flow rate, the chipping size and surface roughness decrease gradually. When the dicing water flow rate is more than 4.5 L/min, the dicing effect tends to be stable. When chipping K9 optical glass under the optimum parameters of glass substrate fastening mode, resin dicing blade and dicing water flow rate of 4.5 L/min, the dicing effect is the best with chipping size of 5.8 μm and surface roughness R_a of 10.5 nm.