Theoretical study on trajectory of swinging plane lapping and polishing

To analyze the influences of swinging motion parameters on lapping and polishing trajectory in plan lapping and polishing with swinging motion, a model on movement trajectory is established, and the quantitative evaluation method of trajectory non-uniformity is used. The results show that the swinging amplitude and the swinging angle have an obvious influence on the trajectory non-uniformity, while the swinging angular velocity has little effect on trajectory non-uniformity except that the swinging angular frequency takes a special value. The trajectory non-uniformity can be well improved when the swinging amplitude is 15 mm and the swinging angle is 30°, whose value can be reduced to 0.058. If the values of the eccentricity and swinging motion parameters are improperly selected, the value of trajectory non-uniformity can be up to 0.284.