The material performance and the service life of YAG (Y
3Al
5O
12) crystal are reduced due to subsurface damage.Based on the classical fracture mechanics model of brittle solids and the formula to calculate median crack depth, it is found out that the median crack is the main factor of subsurface damage (SSD) of brittle material.Through the statistics of the number of diamond grits and the summary of diamond wire cutting parameters, the cutting depth, the normal and tangential forces of single abrasive grain and the cutting projected area was calculated, it is predicted that SSD is closely related to the diamond wire speed
vs, feed speed
vw, cutting material properties, particle size distribution of diamond on electroplated saw wire, and so on.Finally, it is suggested that the model needs further revision through experiments.