To inspect the quality of diamond wire saw,mathematics three-dimensional modeling method is proposed based on the microscopic image analysis to quantitatively analyze parameters such as protrusion height,protrusion rate and area ratio of the grits,and diameters of wire,saw and grits.Five samples are chosen to compare and analyze.Resultsshow that this method could reflect the change of the product quality well,which is an effective guidance for wire saw product quality inspection and control.