Investigation on pad′s conditioning technology and improving self-conditioning of fixed abrasive pad

The surface features of abrasive pad deform during chemical mechanical polishing and as a result the polishing ability of the pad is dramatically reduced.Pad conditioning improves the pad surface profile and consequently the wafer profile.In addition,it reduces defects on pad surface and prolongs its service life.The conditioning technologies of fixed-abrasive pad are introduced in this paper,which can be divided into two types,namely non-self-conditioning and self-conditioning.High pressure water jet,ultrasonic vibration and diamond dresser etc are non-self-conditioning methods.The methods of improving the self-conditioning of hydrophilic fixed polishing pad are emphasized.Choosing proper slurry,adding soluble and optimizing the lapping process parameters can benefit the self-conditioning process.