Effect of different disc materials on sapphire wafer lapping process

SHI Linfeng; HAN Xue; GAO Yongjuan; LI Kehua; SU Hongliang; ZHAO Xiuxiang; LIU Quanwei

doi:10.13394/j.cnki.jgszz.2017.1.0016

Volume 37 Issue 1

Feb. 2017

Turn off MathJax

Article Contents

Article Navigation > Diamond & Abrasives Engineering > 2017 > 37(1): 78-80

SHI Linfeng, HAN Xue, GAO Yongjuan, LI Kehua, SU Hongliang, ZHAO Xiuxiang, LIU Quanwei. Effect of different disc materials on sapphire wafer lapping process[J]. Diamond & Abrasives Engineering, 2017, 37(1): 78-80. doi: 10.13394/j.cnki.jgszz.2017.1.0016

Citation:

SHI Linfeng, HAN Xue, GAO Yongjuan, LI Kehua, SU Hongliang, ZHAO Xiuxiang, LIU Quanwei. Effect of different disc materials on sapphire wafer lapping process[J]. Diamond & Abrasives Engineering, 2017, 37(1): 78-80. doi: 10.13394/j.cnki.jgszz.2017.1.0016

Citation:

PDF( 827 KB)

Effect of different disc materials on sapphire wafer lapping process

doi: 10.13394/j.cnki.jgszz.2017.1.0016

1. Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd., Zhengzhou 450001, China;
2. State Key Laboratory of Superhard Abrasives, Zhengzhou 450001, China

More Information

Rev Recd Date: 2016-12-03

Available Online: 2022-07-12

Abstract

Abstract

Influence of disc material and abrasive on lapping effect of sapphire wafer is analyzed based on actual machining.Lapping effect,product yield and lapping efficiency are compared when using cast iron disc(CID),ceramic compound disc(CCD),resin-copper disc(RCD)and polyurethane cloth(PUC)with B₄C or diamond slurry.The results show that surface quality of sapphire wafer lapped by PUC is best,R_a0.058μm,and that the lapping efficiency of CCD is highest,0.305μm/min with product yield at 96.08%.In conclusion,PUC and diamond slurry are recommended when requiring higher surface quality,such as R_a ≤ 0.06μm,while CCD with B₄C slurry is better if more emphasis is put on cost and efficiency(R_a ≤ 0.08μm).
- surface roughness,
- product yield,
- lapping efficiency,
- cast iron disc,
- ceramic compound disc,
- resin-copper disc,
- polyurethane cloth