Investigation on tribological performance of LIPSS-structured nano-crystalline diamond films
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摘要: 研究基于飞秒激光辐照方法在纳米金刚石(nano-crystalline diamond, NCD)薄膜表面制备的激光诱导周期性结构(laser-induced periodic surface structures, LIPSS)的摩擦学行为。在空气环境下采用脉冲宽度为200 fs,中心波长为1040 nm的掺镱光子晶体光纤飞秒激光辐照NCD薄膜表面产生LIPSS。基于不同的扫描间隔制备2种LIPSS表面,即连续分布的LIPSS表面(continuously distributed LIPSS, CDL)和均匀间隔的LIPSS带状表面(evenly spaced LIPSS stripes, ESLS)。通过球盘式摩擦磨损试验机进行往复式干摩擦试验来对上述2种LIPSS表面的摩擦学性能进行表征,其中的对磨球为ZrO2陶瓷材质。往复式摩擦试验采用了平行和垂直于LIPSS纹理的2种摩擦方向。研究结果表明:施加LIPSS后的NCD薄膜表面容屑能力得到改善,同时摩擦接触面积降低,因而相比于原始NCD薄膜,其摩擦系数明显降低;对于CDL表面,摩擦方向与LIPSS纹理垂直时的摩擦系数比纹理平行时的更高;ESLS表面的LIPSS纹理方向对摩擦系数无影响。
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关键词:
- 纳米金刚石薄膜 /
- 飞秒激光辐照 /
- 激光诱导周期性表面结构 /
- 摩擦性能
Abstract: The aim of present work was to investigate the tribological behavior of CVD nano-crystalline diamond (NCD) films with laser-induced periodic surface structures (LIPSS). The LIPSS textures were fabricated in ambient air using a Yb-doped photonic crystal fiber amplifier femtosecond (fs) laser with pulse duration of 200 fs and central wavelength of 1040 nm. Two types of LIPSS texture, namely continuously distributed LIPSS (CDL) texture and a complex texture formed of evenly spaced LIPSS stripes (ESLS), were obtained with the above processing conditions. The tribological behavior of as-fabricated LIPSS textures was evaluated via ball-on-disc tests in dry reciprocating sliding motion, and ZrO2 ceramic balls were used as counterparts. In addition, there were two types of reciprocating direction involved in the frictional tests, namely the direction parallel/vertical to the orientation of LIPSS ripples. The results indicate that as the LIPSS can work as reservoir for wear debris and reduce the contact area during the friction process, the LIPSS textured NCD surface showed obviously reduced friction coefficient in comparison with the conventional NCD surface, which was reduced from 0.42 to 0.09. Besides, for the CDL surface, the friction coefficient as the LIPSS ripples vertical to the reciprocating direction was higher than that as the LIPSS ripples parallel to the reciprocating direction. In the case of ESLS surface, however, the direction of the LIPSS ripples had little influence on the friction coefficient. -
表 1 NCD薄膜沉积工艺参数
Table 1. Deposition parameters of NCD films
参数 形核 生长 气压 p / kPa 0.160 0.067 流量 V / sccm① 300 300 甲烷/氢气体积比 1% 1% 热丝间距 d / mm 10 10 热丝温度 θf / ℃ 2100±200 2100±200 衬底温度 θs / ℃ 900±50 900±50 偏压电流密度 i / (A·cm−2) 0.1 0.1 沉积时长 t / h 0.5 3.5 注:① sccm为standard cubic centimeter per minute的简称,1 sccm即每分钟流过标准状态下的气体体积为1 cm3。 表 2 飞秒激光辐照工艺参数
Table 2. Laser specifications used for fs laser irradiation
参数 数值或规格 波长 λ / nm 1040 脉冲能量 Q / nJ 0.8 脉冲宽度 W / fs 200 重复频率 f / kHz 500 光斑直径 d / μm 10 能量密度 p / (J·cm−2) 5.1 规格 Linear 表 3 表面粗糙度测试及摩擦试验试样汇总
Table 3. Summary of the used specimens in surface roughness and friction tests
名称 表面处理 探针运动方向/摩擦方向 F1 未处理NCD F2 CDL表面 平行于LIPSS纹理方向 F3 CDL表面 垂直于LIPSS纹理方向 F4 ESLS表面 平行于LIPSS纹理方向 F5 ESLS表面 垂直于LIPSS纹理方向 试样 峰编号 拉曼位移 λ / (cm−1) 成分 FWHM / (cm−1) 相对强度 I / % ID /IG ITPA/IG 金刚石相含量Cd / % Peak 1 1182.13 反式聚乙炔 (TPA) 156.87 15.14 1.12 0.48 23.27 Peak 2 1258.67 非晶相金刚石 81.87 2.45 原始 Peak 3 1335.38 多晶金刚石 7.87 0.13 NCD Peak 4 1345.19 非晶碳(D mode) 134.99 35.43 Peak 5 1460.76 反式聚乙炔 (TPA) 98.84 15.36 Peak 6 1564.61 石墨(G mode) 124.28 31.48 LIPSS Peak 1 1155.92 反式聚乙炔 (TPA) 111.79 10.52 1.36 0.32 29.58 Peak 2 1232.71 非晶相金刚石 64.61 2.12 Peak 3 1336.01 多晶金刚石 10.77 0.18 Peak 4 1342.86 非晶碳(D mode) 163.71 44.23 Peak 5 1463.44 反式聚乙炔 (TPA) 83.95 10.50 Peak 6 1558.62 石墨(G mode) 128.87 32.44 -
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