Polishing performance of annular magnetorheological finishing head
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摘要: 半球谐振子的加工效率是影响半球谐振陀螺仪应用的主要因素。在环形磁流变抛光方式的基础上,提出平面化类比的简化加工抛光器并探索其加工性能。通过单因素探索试验和正交试验研究磁感应强度、抛光器转速、加工间隙、金刚石粒径等因素对抛光性能的影响。结果表明:使用环形磁流变抛光器抛光熔石英,当磁场磁感应强度较强,抛光器转速350 r/min,加工间隙0.6 mm,金刚石粒径为0.5~1.0 μm时,石英材料去除率为191.2 nm/min,表面粗糙度Ra值为3.31 nm,抛光效果良好。Abstract: The processing efficiency of the hemispherical shell resonator (HSR) is the main factor affecting the application of the hemispherical resonator gyroscope (HRG). Based on the annular magnetorheological finishing method, a simplified planar toroidal polishing head was adopted to estimate its machining performance. The effect of several factors on polishing performance was explored through single factor test and orthogonal test, namely magnetic field intensity, polishing head rotation speed, gap between workpiece and polishing head, and abrasive size. Results show that when polishing fused quartz glass at strong magnetic field intensity, polishing head rotation speed of 350 r/min, gap of 0.6 mm, and diamond size of 0.5 to 1.0 μm, the material removal rate reaches 191.2 nm/min and the average surface roughness Ra is 3.31 nm, thus exhibiting excellent processing properties.
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