Abstract: According to the physical and chemical properties of K9 optical glass,based on the dry chemical-mechanical grinding(CMG),NaHCO₃ liquid is prepared using ultrasonic atomization to grind K9 optical glass.The optimal CeO₂ abrasives under the atomized environment are developed after grinding tests.In addition,the influence of workpiece speed,abrasive speed and pH value of atomized liquid on the surface roughness and material removal rate of K9 optical glass are compared using orthogonal tests.Resultsshow that liquid pH affects the surface roughness of K9 optical glass most,followed by abrasive speed and workpiece speed.The strongest impact on the material removal rate of K9 optical glass comes from liquid pH,while the workpiece speed ranks second and abrasive speed last.The wet CMG with appropriate amount of atomized liquid could improve the processing quality and speed without dust pollution from dry CMG,which is suitable for K9 optical glass precision finishing.